Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEO_SI > 2021 > SF2A > SF2A.3

Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

A. Marinins, J. Kjellman, C. Caer, T. David, X. Rottenberg, R. Jansen, and P. Soussan

Not Accessible

Your library or personal account may give you access

Abstract

We demonstrate 800 nm thick low-loss dual-layer LPCVD SiN optical waveguides with tunable profile shape to engineer modal properties. We achieved <10 dB/m loss at 1550 nm wavelength and nearly lossless vertical transitions between waveguides.

© 2021 The Author(s)

PDF Article  |   Presentation Video
More Like This
Low-loss, multi-reticle stitched SiN waveguides for 300mm wafer-level optical interconnects

Pengfei Xu, Chiara Marchese, Guy Lepage, Negin Golshani, Ruben Van Eenaeme, Andrea Mingardi, Joost Van Ongeval, Rafal Magdziak, Luc Halipre, Darko Trivkovic, Peter Verheyen, Maumita Chakrabarti, Dimitrios Velenis, Andy Miller, Filippo Ferraro, Yoojin Ban, and Joris Van Campenhout
M4A.3 Optical Fiber Communication Conference (OFC) 2024

Bragg Reflector Co-integrated with SiN and a-Si on 300 mm Wafers for Low Loss Optical Beamformers

A. Marinins, J. Kjellman, M. Prost, T. D. Kongnyuy, S. Saseendran, M. S. Dahlem, X. Rottenberg, R. Jansen, and P. Soussan
SM4G.6 CLEO: Science and Innovations (CLEO:S&I) 2022

Material characterisation of LPCVD SiN and understanding loss behavior

Cian Cummins, Biwei Pan, Gunther Roelkens, Marcus Dahlem, Sandeep S Saseendran, and Philippe Helin
ce_p_16 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023

View More...

Presentation Video

Presentation video access is available to:

  1. Optica Publishing Group subscribers
  2. Technical meeting attendees
  3. Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads

More Like This
Low-loss, multi-reticle stitched SiN waveguides for 300mm wafer-level optical interconnects

Pengfei Xu, Chiara Marchese, Guy Lepage, Negin Golshani, Ruben Van Eenaeme, Andrea Mingardi, Joost Van Ongeval, Rafal Magdziak, Luc Halipre, Darko Trivkovic, Peter Verheyen, Maumita Chakrabarti, Dimitrios Velenis, Andy Miller, Filippo Ferraro, Yoojin Ban, and Joris Van Campenhout
M4A.3 Optical Fiber Communication Conference (OFC) 2024

Bragg Reflector Co-integrated with SiN and a-Si on 300 mm Wafers for Low Loss Optical Beamformers

A. Marinins, J. Kjellman, M. Prost, T. D. Kongnyuy, S. Saseendran, M. S. Dahlem, X. Rottenberg, R. Jansen, and P. Soussan
SM4G.6 CLEO: Science and Innovations (CLEO:S&I) 2022

Material characterisation of LPCVD SiN and understanding loss behavior

Cian Cummins, Biwei Pan, Gunther Roelkens, Marcus Dahlem, Sandeep S Saseendran, and Philippe Helin
ce_p_16 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023

View More...
Low Stress Bilayer LPCVD-PECVD SiN Waveguides for Kerr Frequency Comb Generation

Karl J. McNulty, Xingchen Ji, Andres Gil-Molina, Mateus Corato-Zanarella, Gaurang R. Bhatt, Ipshita Datta, Shriddha Chaitanya, Yoshitomo Okawachi, Alexander L. Gaeta, and Michal Lipson
STh1J.2 CLEO: Science and Innovations (CLEO:S&I) 2023

Towards Low Propagation Losses in Active Photonic Multi-Project Wafer Runs

Lewis G. Carpenter, Matthew van Niekerk, Amir Begović, Vijay S.S. Sundaram, Venkatesh Deenadayalan, Thomas Palone, Michael Fanto, Stefan Preble, Christopher Baiocco, Gerald L. Leake, Nicholas M. Fahrenkopf, and David L. Harame
ITu3A.5 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2021

Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use