Abstract

A new approach for defect inspection and properties evaluation of indium tin oxide (ITO) conducting glass is demonstrated with optical coherence tomography (O CT). W ith OCT scanning, the defects can be clearly identified at the different depths. Besides the morphological information, several parameters also can be estimated including the thickness of glass, group refractive index, reflection coefficient and transmission coefficient, which can be used to evaluate the quality of ITO conducting glass. From the results, one can see that OCT could be a potential imaging tool for defect inspection of ITO conducting glass or other industrial products.

© 2011 Optical Society of America