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Abstract
795 nm vertical-cavity surface-emitting lasers (VCSELs) with dielectric surface gratings to control the output polarization are designed and fabricated. The calculated results demonstrate that a well-designed ${{\rm SiN}_{\rm x}}$ surface grating positioned on the surface of an anti-phase VCSEL structure enhances the reflectivity difference between the two polarization modes compared to a conventional GaAs surface grating, consequently resulting in a larger gain anisotropy in VCSELs and a high orthogonal polarization suppression ratio (OPSR). Characterization shows that a peak-to-peak OPSR of 30.3 dB is achieved at 85°C for 795 nm VCSELs with a ${{\rm SiN}_{\rm x}}$ surface grating of 5 µm in diameter and an oxide aperture of ${\sim}{4}\;{\unicode{x00B5}{\rm m}}$, demonstrating the effectiveness of the ${{\rm SiN}_{\rm x}}$ surface grating in polarization control for 795 nm VCSELs.
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